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Facilities

Research facilities being utilized for QESST-related research at Arizona State University include the Solar Power Lab (SPL), the NanoFab CSSER,the LeRoy Eyring Center for Solid State Science and TÜV Rheinland Photovoltaic Testing Laboratory LLC.

The laboratory for the SPL, a 4976 square foot clean room, is situated in the MacroTechnology Works building at the Arizona State University Research Park. This state-of-the-art clean room has extensive handling for high purity gases and sophisticated semiconductor process equipment including:

SPL Metrology Equipment

Alessi Probe Station

Atomic Force Microscope

Electro-luminescence

Flash Solar Cell Tester

Four Point Probe

Hitachi S7800 Scanning Electron Microscope

Nanometrics Reflectometer

Profilometer

Quantum Efficiency

Rudolph AutoEL III Ellipsometer

Sinton Lifetime Tester

SPL Processing Equipment

AMAT P-5000 PECVD

AST 280 Rapid Thermal Processor

Belt Firing Furnace

Box Furnaces

MRL 1414 Diffusion Furnace

Molecular Beam Epitaxy

Screen Printers

Spin Rinse Dryer

Sputtering System

Wet Chemistry for Wafer Cleaning

Wet Chemistry for Wafer Texturing

Permanent link to this article: http://qesst.asu.edu/research/facilities-2

QESST Partners Arizona State University California Institute of Technology University of Delaware Massachusetts Institute of Technology The University of New Mexico Georgia Tech University of Houston Imperial College - London The University of Tokyo The University of New South Wales The University of Arizona